ECS
A high-end manufacturing enterprise that integrates research and development, manufacturing, and sales
MoreFocusing on semiconductor accessory equipment and core components
Shengyi Semiconductor Technology (Wuxi) Co., Ltd. (referred to as "Shengyi Technology") adheres to technological innovation as the core, with the research and development and industrialization of semiconductor accessory equipment and components as the goal, and the development strategy of differentiated competition and innovation as the direction. It is a high-end manufacturing enterprise that integrates re...
① Exhaust gas removal efficiency> 95%
② Floor area (280L * 120W * 230H, unit: cm)
③ Stable air volume control (fluctuation< 3%)
④ Customized drainage mode, environmentally friendly and water-saving
⑤ Global anti-corrosion design of the machine
① Active pressurization to compensate for insufficient factory capacity, suitable for complex pipeline renovation
② Floor area (151L * 111W * 178.5H, unit: cm)
③ Real time control of closed-loop pressure within ± 3% of the set value of demand pressure
④ Customized services to meet the customization of 4-18 chamber equipment
⑤ Global anti-corrosion design of the machine
① Replacing traditional liquid medicine requirements, safe and environmentally friendly, clean and clean
② Floor area (151L * 111W * 178.5H, unit: cm)
③ Can maintain concentration control within ± 0.5ppm of the set concentration value
④ Customized services to meet the customization of 25-165ppm concentration
⑤ PFA acid and alkali resistant materials are used in the ozone water contact area to reduce particle generation
① Corrosion resistant structural design
② Filter material: 100% PTFE
③ Removal efficiency: 99.9995%@ MPPS@0.1 ㎛
④ Air flow uniformity within the plane< 15%
⑤ Main device interactive communication, active control+passive control
① Corrosion resistant structural design
② Filter material: reinforced activated carbon, ion exchange resin
③ Removal efficiency: initial stage>90%
④ Long service life: 12 months
⑤ Functionally integrated, while removing acidic and alkaline organic gases
① The rotor operates without any contact, wear, or particle generation
② Miniaturization and high integration
③ Anti corrosion structural design, capable of transporting acid, alkali, and organic liquids
④ High temperature resistance (90 ℃), long service life
⑤ Large flow rate and high speed
Product model: SHM-075
Speed 0~9000rpm, maximum flow rate 75L/min
Product model SHM-140
Maximum speed 0~8000rpm, maximum flow rate 140L/min
Contact us here ?