With advanced independent research and development technology and rich product lines, Shengyi Technology has developed into a certain level of
A competitive supplier of specialized equipment and core components in the semiconductor field.
① Exhaust gas removal efficiency> 95%
② Floor area (280L * 120W * 230H, unit: cm)
③ Stable air volume control (fluctuation< 3%)
④ Customized drainage mode, environmentally friendly and water-saving
⑤ Global anti-corrosion design of the machine
① Active pressurization to compensate for insufficient factory capacity, suitable for complex pipeline renovation
② Floor area (151L * 111W * 178.5H, unit: cm)
③ Real time control of closed-loop pressure within ± 3% of the set value of demand pressure
④ Customized services to meet the customization of 4-18 chamber equipment
⑤ Global anti-corrosion design of the machine
① Replacing traditional liquid medicine requirements, safe and environmentally friendly, clean and clean
② Floor area (151L * 111W * 178.5H, unit: cm)
③ Can maintain concentration control within ± 0.5ppm of the set concentration value
④ Customized services to meet the customization of 25-165ppm concentration
⑤ PFA acid and alkali resistant materials are used in the ozone water contact area to reduce particle generation
① Corrosion resistant structural design
② Small size, high integration (151L * 111W * 178.5H, unit: cm)
③ Wide flow range: 5-40LPM
④ Low specific impedance effect: 0.025-2M Ω · cm
