Provide ozone functional water for the main equipment, which can be used to remove metal particles and organic matter added during wafer manufacturing process
① Replacing traditional liquid medicine requirements, safe and environmentally friendly, clean and clean
② Floor area (151L * 111W * 178.5H, unit: cm)
③ Can maintain concentration control within ± 0.5ppm of the set concentration value
④ Customized services to meet the customization of 25-165ppm concentration
⑤ PFA acid and alkali resistant materials are used in the ozone water contact area to reduce particle generation