With advanced independent research and development technology and rich product lines, Shengyi Technology has developed into a certain level of
A competitive supplier of specialized equipment and core components in the semiconductor field.
① Corrosion resistant structural design
② Filter material: 100% PTFE
③ Removal efficiency: 99.9995%@ MPPS@0.1 ㎛
④ Air flow uniformity within the plane< 15%
⑤ Main device interactive communication, active control+passive control
① Corrosion resistant structural design
② Filter material: reinforced activated carbon, ion exchange resin
③ Removal efficiency: initial stage>90%
④ Long service life: 12 months
⑤ Functionally integrated, while removing acidic and alkaline organic gases
① The rotor operates without any contact, wear, or particle generation
② Miniaturization and high integration
③ Anti corrosion structural design, capable of transporting acid, alkali, and organic liquids
④ High temperature resistance (90 ℃), long service life
⑤ Large flow rate and high speed
Product model: SHM-075
Speed 0~9000rpm, maximum flow rate 75L/min
Product model SHM-140
Maximum speed 0~8000rpm, maximum flow rate 140L/min
